Used NIKON NSR SF130 #9237550 for sale

NIKON NSR SF130 is a multi-field, high-precision die-to-die (D2D) stepper for the advanced review of thick wafers and flat panel displays. NIKON NSR-SF130 features an advanced 12 mag and 15 mag dual, multi-field lenses - thus offering superior imaging performance for high demanding photolithography applications. This equipment is capable of exposing a single patterned field on any point within the 75mm x 75mm imaging area, and can switch between two set fields within 2 seconds. By selecting high speed step and scan mode, this stepper can place 3 to 6 wafers per hour and can support 8-inch or 12-inch wafer sizes with a 1/3 reduction area. The system is capable of fine alignment accuracy with linear encoders, focus and on-the-fly forward-backward scan control. It also has an automated alignment unit to ensure superior overlay alignment accuracy and to reduce misalignment risks. This machine also incorporates a high-precision stage with linear motors and a temperature-controlled environment for improved imaging accuracy. NSR SF 130 has a vacuum chuck and retainer for substrate slip prevention, which enables it to accurately expose and transfer photomasks from around the wafer. The tool can also use various types of photoresists such as chemically amplified and thermal oxide, and prevents wafer contamination during transfer. NIKON NSR SF 130 has several robust safety features in place, such as an emergency stop button and one-touch reset, auto-recovery functions, and auto shutdown functions. This asset uses a low-maintenance, easy-to-operate control model that allows for fast kick-starts, simple maintenance, and reduces downtime due to input traceability. NSR-SF130 combines advanced optics and innovative design to provide maximum process control and an efficient wafer handling equipment. This stepper utilizes advanced features such as comprehensive alignment and light leakage detection, and achieves high levels of production yield through its tight precision levels and single wafer exposure capabilities. NSR SF130 is currently a leader in its domain and finds application in a variety of areas including semiconductor and flat panel display manufacturing, life science research, and other areas of precision imaging.