Used NIKON NSR SF130 #9243127 for sale

NIKON NSR SF130 Wafer Stepper is a high-precision, ultra-high speed lithography equipment with performance capabilities for a wide range of semiconductor device manufacturing processing applications. This system is capable of delivering sub-50nm resolution over a wide dynamic range, enabling the production of high-performance, high-density devices with optimized process costs. It offers the highest quality imaging on patterned wafers, with the throughput and productivity necessary to increase yield and device performance. NIKON NSR-SF130 offers very high throughput, with up to 5,000 wafers per hour for single materials and up to 8,000 wafers per hour for multiple materials. It also offers high-speed ND alignment and exposure, with the ability to perform multiple wafer alignment at once. This unit features high-speed data acquisition to adjust exposure settings and process optimization settings to optimize production performance in real time. The NIST Quantum Deflection Multiple Subfield Algorithm (QDMSA) enables optimized imaging performance while the AutoMatch Imaging Technology reduces alignment time and provides high precision wafer stitching. The stepper features Flexible Structuring Technology which offers a variable line width capability and supports working on overhang and various line angles, to precisely position patterns, even in difficult 3D regions. The machine also features ultra-high resolution NGREELEX which eliminates line-edge roughness and enables production of high-performance, ultra-fine devices. NSR SF 130 offers excellent, stable production performance for long-term production operation, with an anti-contamination construction built for continuous operation over extended periods. It offers digital servo control for fast, accurate alignment and exposure with minimal vibration. The tool is also equipped with NIKON Smart Chip technology for integrated operation and monitoring of pattern-based performance, including focus, dose and exposure settings. NSR SF130 asset is ideal for use in semiconductor high-volume production lines and provides excellent performance, through innovative solutions to meet the increasing demands and complexity of developing semiconductor devices.