Used NIKON NSR SF130 #9383073 for sale

NIKON NSR SF130
Manufacturer
NIKON
Model
NSR SF130
ID: 9383073
Wafer Size: 12"
Vintage: 2005
i-Line stepper, 12" 2005 vintage.
NIKON NSR SF130 is a reliable and versatile wafer stepper that has become a popular choice for semiconductor fabrication professionals. This single-field scanning wafer stepper is capable of making high-accuracy and high-resolution microlithography patterns on wafers up to 6 inches in diameter. It features an integrated NIKON NSR optical system, designed with off-axis illumination, and a one step catadioptric objective lens that ensures high performance and eliminates distortion. The system has a large working area, allowing for larger substrates to be processed and can accommodate up to eight cassettes of wafers with perfect alignment. NIKON NSR-SF130 is equipped with state-of-the-art components, ensuring accuracy and reliability in the microlithography process. Its integrated high-speed numerical pattern generator accurately and precisely controls the X, Y stages for wafer positioning, allowing for high economic performance. Its precision scan speed is up to 20 μm/sec and its accuracy is ± 0.25 μm. This machine allows for higher exposure times, while at the same time incorporating a fast XY stage and advanced motion control. NSR SF 130 has an intuitive graphical user interface that is easy to learn and use. It enables users to control and monitor the entire patterning process with ease. Features include high resolution imaging and a preview of the exposure pattern. It also offers a variable choice of pinholes, automatic alignment, variable focus positions, and variable exposure time for custom patterning. NSR-SF130 offers superior performance in its design and advanced features. It is a reliable, robust and cost-effective tool for microlithography applications. It is well suited for demanding jobs such as precision patterning on small substrates, as well as for general use including research, prototyping and production. With its precise and advanced technology, NIKON NSR SF 130 is the perfect choice for a wide range of wafer fabrication processes.
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