Used NIKON NSR SF130 #9389330 for sale

NIKON NSR SF130 is an advanced fully automated step and repeat lithography equipment designed for high throughput, high yield and reliable performance. The SF130 is a dedicated wafer stepper designed to transfer high resolution patterning onto various substrates including silicon, quartz, glass and ceramic. With a maximum substrate area of 200 mm x 200 mm and a field size of 13 mm x 13 mm, the SF130 can accommodate a wide range of wafer sizes and mask sizes. The system comes with automated focus and alignment functions and advanced transparency detection unit. The imaging optics of the SF130 feature a special structure and high-performance optics to accurately and precisely reduce pattern layouts. It also features a projection lens which is coated using NIKON Super Multi Layer Coating, which provides excellent resolution, contrast, and laser markable accuracy. Furthermore, the exposure control machine features a high-speed ND filter for smooth exposure uniformity and fast switching times. The SF130 is engineered for optimal uptime and reliability with an automated maintenance tool that monitors key components and warns in case of trouble. The asset also has an intuitive user interface which can be easily customized to accommodate a variety of production environments, including semi-auto operation. It also has a large range of additional functions and options that can be tailored to user requirements. The model can be easily integrated via its various communication ports and data interfaces in a wide variety of applications. NIKON NSR-SF130 comes with NIKON advanced wafer registration equipment which utilizes a low-distortion optical pattern sensing head and a massive registration table. This allows the system to track and correct any change in substrate position. All in all, NSR SF 130 is an advanced, high-performance wafer stepper designed for efficient, accurate and reliable production of high-quality microlithography for a variety of applications. With its reliable optics, ND filter, automated maintenance unit, intuitive user interface and advanced registration machine, the SF130 is an efficient and effective solution for any lithography requirement.