Used NIKON NSR SF130 #9391655 for sale

NIKON NSR SF130 is a wafer stepper that is essential for patterning layers in the production of complicated microelectronic devices such as integrated circuits (ICs). It consists of two primary elements: the projection optics and the stage. The projection optics consists of a lens mounted on a precision linear stage and is responsible for projecting images onto the wafer surface. This projection optics is further located on a stage which moves in both X and Y directions. It also uses encoders to measure the movements of the stage and provide feedback to the control equipment. NIKON NSR-SF130 wafer stepper employs best-in-class features to ensure high resolution and precision. It boasts an excellent projection optical lens system with an NA of 0.97, which provides high sharpness and linearity, as well as an effective resolution of 0.75µm or less. Additionally, this wafer stepper has a robust protection unit for both the projection lens and wafer, along with convective cooling for high and stable throughput. NSR SF 130 is also equipped with a double-ray field uniformity calibration machine to ensure that the projected images and illumination spot size of the stage remains virtually equivalent from all positions. Moreover, the projection lens is attached with a custom-made mounting stabilizer to eliminate the aberrations, thus enabling perfect patterning on the wafer surface. This wafer stepper supplies a wafer alignment tool for high accuracy and speed which makes it ideal for cost-sensitive production environments. Furthermore, its wide range of exposure settings makes it compatible with image generators and a range of photomasks. Finally, this wafer stepper has best-in-class capabilities to ensure high throughput and accurately pattern the layers of integrated circuits, making it a frontrunner in the production of ICs.