Used NIKON NSR SF130 #9391948 for sale

NIKON NSR SF130
Manufacturer
NIKON
Model
NSR SF130
ID: 9391948
Wafer Size: 8"
i-Line stepper, 8".
NIKON NSR SF130 Wafer Stepper is a high-performance, high-precision equipment that is used for lithographic pattern generation in semiconductor manufacturing. This system is designed for wafer production runs on 8", 12" and larger wafers, and is employed in wafer stepper applications including critical-layer and post-etch alignment. NIKON NSR-SF130 offers a resolution of 0.05 microns (1/20,000 of an inch) with a repeatability of 0.02 microns and a non-orthogonality accuracy of 0.5 degrees. It is capable of scanning a wafer with a scan speed of up to 450mm/second. It is a large-diameter, single-beam step and repeat unit, featuring an automated machine alignment. This means that it can move a wafer and accurately reproduce features across the entire wafer area. NSR SF 130 Wafer Stepper is equipped with a projection lens, which enables it to project images of a very small size. The light source is provided by a CCD camera or semiconductor laser, and has a wavelength range of 320nm to 450nm. With a stabilized signal beam, the tool is able to produce nanometre-scale patterns with maximum accuracy and precision. Its sophisticated image sensing technology ensures that images are accurately captured. The asset has the ability to detect shifts and imperfections in the images at the sub-pixel level, thereby correcting any distortions. The machining accuracy is further enhanced by an autofocus model that is used to adjust the optics to obtain the best focus. NIKON NSR SF 130 Wafer Stepper also offers a variety of image optimization features which enable its users to selectively control exposure levels and focus amplitude. Its advanced image registration equipment evaluates thickness and topography of the wafer, thereby enabling precise overlays. It is equipped with a data automation software package called NIKON GMS-MOTION which simplifies the processes of pattern matching and throughput optimization. This system gives users the flexibility to create templates, execute repeatable batch jobs, and display information on the LCD monitor. Additionally, NIKON SF130 Wafer Stepper integrates with NIKON workstations and can be integrated with external software. NSR SF130 Wafer Stepper is an excellent investment for high-precision projects. Its advanced imaging capabilities, robust construction and automation flexibility make it suitable for a wide range of wafer fabrication processes. With its high precision and repeatability, NSR-SF130 is ideal for the development of critical layers in semiconductor devices and contributes to higher yields and greater productivity.
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