Used NIKON NSR SF140 #293589679 for sale

NIKON NSR SF140 is a high-performance wafer stepper used primarily in the fabrication of semiconductor devices. It is equipped with a high-resolution scan head, an advanced illuminating equipment, and a proprietary lens system, making it the ideal tool for high-precision pattern imaging on a wide range of materials and substrates. The main body consists of a dual-stage XYZ linear motor unit for high-precision stepper movement, along with an XY chuck fixture machine for fast, accurate wafer alignment. NIKON NSR-SF140 features a 6-axis flexure architecture for ultra-high stage acceleration and minimized vibration, providing a stable imaging process. The standard scan head is equipped with an ultra-high resolution 5-axis stage, enabling imaging with a step size as small as 6nm. Furthermore, the CCD camera situated on the scan head has a resolution of 26 megapixels, providing an image of the wafer with unparalleled precision and detail. NSR SF 140 also features a specialized illuminating tool that increases substrate throughput by providing a uniform BPI (brightness per inch) across the entire imaging field. The optical lens asset consists of multiple tandem lenses with a NA of 0.55 and a magnification range of 5X-100X, providing excellent overlay accuracy even on high-density patterns. Overall, NIKON NSR SF 140 is a highly advanced wafer stepper designed to provide excellent imaging results. By combining a revolutionary scan head, a precision-oriented lens model, and a specialized illumination equipment, NSR-SF140 offers ultra-high resolution imaging and top-tier overlay accuracy in a compact, user-friendly package.