Used NIKON NSR SF155 #9298590 for sale

NIKON NSR SF155 is a wafer stepper that is designed to meet the most stringent requirements of advanced lithography. It is a highly productive platform which offers users cost efficiency, process uniformity, and fast alignment accuracy. This tool is equipped with the company's patented 'Super Resolution' technology and an optimized Dose Rate Detector, enabling it to produce the most advanced nanometric circuit patterns. NSR SF155 is a large field high-resolution SEMI step and scan equipment consisting of a photolithography optics module, an exposure controller, and a wafer stage and backside alignment subsystem. The SF155 delivers a superior optical performance, offering more than a 55% degree of vision and a high numerical aperture (NA) of 1.46. It is also capable of providing a wide exposure range from 5 microns to 300mm, enabling the use of advanced patterning process. The platform is powered by an NSR-EX exposure controller that provides motor control and excellent pattern placement accuracy. It offers a flexible interferometric alignment system with a built-in dry alignment unit and offers sub-nanometer alignment precision down to 10 angstroms. The motion control of the machine is capable of 5nm in the X and Y axes and its scan range is capable of up to 200nm. The photolithography tool has a laser-marking laser source for alignment and features a 3-wafer auto loader for increased productivity and work efficiency. The asset also features a computer-integrated imaging package, providing users with a wide range of functional capabilities. The platform can be customized with various options such as an extended focus range, wafer mapping, and 5D image simulation. NIKON NSR SF155 also offers an advanced pattern recognition and line profile analysis model that supports both OPC and RET data formats. It also offers three-dimensional shot formation and stitching of line patterns that are needed for the most complex lithography applications. The equipment is designed for high throughput operations and offers fast scanning performance with minimal shock and vibration. All in all, NSR SF155 is an effective lithography platform for advanced IC fabrication with its sophisticated technologies and performance.