Used NIKON NSR SF155 #9311227 for sale

NIKON NSR SF155 is a wafer stepper designed for high productivity and versatile mask aligner. Ideal for production of advanced devices including MEMS, LED and sensors, the stepper provides superior performance for a wide variety of applications. NSR SF155 is equipped with the latest NIKON GEN5 lithography source and a patented radial uniformity control equipment to ensure high accuracy and stable overlay. Its 150mm mask stage offers 74mm max X overlap range, and can align a full 8-inch wafer. NIKON innovative optical system and zoning unit align the wafer to the mask with ≦ 15μm accuracy. The stepper's mechanical positioning unit provides a max 150mm travel range with nanometer-level accuracy, enabling positional control of the substrate with only one exposure. NIKON NSR SF155 is designed for high throughput. It features the fast and efficient NIKON Asymmetrical Frequency Scanning Machine (AFSS) which can achieve a throughput of 510WPH in a one-step scan process. The stepper is also equipped with a multi-track field illumination tool with 7nm pitched lines for exposing monolithic patterns at higher resolutions. NSR SF155 is also designed for reliability and low maintenance. Its quick gate valve replacement asset reduces downtime due to maintenance, while its patented superconductor static Eliminate model reduces contamination in the stepper. It is also designed with radiation shielding and a fume evacuation equipment to ensure safe operation while maintaining clean room conditions. Overall, NIKON NSR SF155 is an advanced production stepper designed to provide optimal performance in the production of advanced devices including MEMS, LED and sensors. Its combination of speed, accuracy, and low maintenance cost makes it an ideal choice for production lines.