Used NIKON NSR TFH 2 #9205047 for sale

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NIKON NSR TFH 2
Sold
Manufacturer
NIKON
Model
NSR TFH 2
ID: 9205047
Wafer Size: 2"
Vintage: 1995
Stepper, 2" 1995 vintage.
NIKON NSR TFH 2 is a state-of-the-art wafer stepper designed to meet the most demanding lithography requirements of leading-edge semiconductor device fabrication. It provides extremely high-resolution, accurate stage motion with a sub-wavelength alignment accuracy of 0.5nm. The motion equipment utilizes a high-end linear motor with dual stage modules (X-Y and Z-axis) for precise control over the postioning motion. The wafer stage and exposure system are equipped with top-of-the-line data acquisition and positioning components that provide fine resolution control over wafer movements. The wafer stepper is driven by a powerful programmable smart controller, which provides complete integration with advanced industrial automation systems. With its powerful data acquisition and fusion techniques, the controller can easily extract data from various sources such as sensors, machine vision, CNC controls, vision systems, and even 3D scanning, thereby enabling unit-level optimization and integration across disparate fabrication processes. The control machine is further integrated with high-performance Scanning White-Light Interferometry (SWLI) tool for precise, accurate alignment and positioning of the wafer stage. NSR TFH 2's laser-precision beam optics module ensures sub-wavelength resolution of the lithography process, while its high-end ion and electron optics modules provide pixel-accurate, high contrast lithography. It supports a variety of photomask types, including PSM, LCD, BD, and DMDM products. Additionally, the optics transmitter module includes an adaptive optics correction asset, compensating for aberrations in the optical path. Furthermore, the device is available with a range of flexible optical spectra, offering excellent performance within a broad range of exposure wavelength. Its versatile image sensor array provides reliable exposure control and excellent image quality control. In addition, NIKON NSR TFH 2 features an ultra-high-speed data interface that enables faster machine-control data transfer and manipulation, along with a high-bandwidth connection for faster data communication. This helps reduce the time taken to complete each job and allows for faster throughput. The machine also supports a range of pattern-data types and formats, making it easier to manage and transfer the data. Altogether, NSR TFH 2 is an ultra-precise and powerful wafer stepper that can support leading-edge semiconductor device fabrication processes with the highest-quality lithography. It is capable of sub-wavelength alignment accuracy, precise control over the wafer motion, and reliable image quality. Its high-end optics and data communication capabilities further add to its appeal.
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