Used NIKON NSR #293668735 for sale

NIKON NSR is a wafer stepper used in semiconductor fabrication processes. This tool is a lithographic projection stepper developed by NIKON that can accurately fabricate small features down to 35 nm on thin and even wafers. It has an optimised stepper control and operates on a stable platform. This stepper offers excellent pattern overlay, pattern placement accuracy and repeatability. NSR features an integrated reflective imaging optics and a wide numerical aperture, which provides high resolution patterns with excellent throughput. This feature also enables detection of mask defects in an easy and reliable manner. The stepper offers high-performance, long-term stability, and an adjustable spot size, which caters for pixelation of patterning elements. To ensure consistent performance and yield, NIKON NSR is equipped with a self-calibrating wafer stage, which can accurately measure the distance between the illuminator and the wafer. This equipment also has a highly efficient motor control system for precise positioning of the wafer in the fabrication process. The stepper also incorporates Servo Correction Unit, which is capable of making rapid corrections during patterning operations. In addition, NSR also has a high-performance temperature control machine with a precise heater and thermostat control that can precisely control the wafer temperature in the range of 20 to 50 ˚C. This feature also reduces mainteance and eliminates thermal drift in the patterning process. Furthermore, the stepper utilizes SynchroScan tool technologies to rapidly process multiple wafers within a short period of time. This asset also provides excellent automation support by allowing users to set the parameter adjustments in advance and make quick adjustments to the wafer sizes. Overall, NIKON NSR is a high-performance lithographic projection stepper that is capable of accurately and quickly fabricating patterned micro-structures with excellent repeatability and process control. This tool provides cost-effective and reliable solutions for the fabrication of extremely small parts and wafers.