Used NIKON NSR #293819945 for sale

NIKON NSR is an advanced wafer stepper equipment which enables efficient production of integrated circuits. It is a complete pattern generation system which combines a reticle, motion control unit and a fully computer controlled optical machine. Utilizing a 0.25 NA projection optics and a CCD camera, NSR is able to achieve chip level production for a vast array of IC production. The tool utilizes a boom type reticle stage with 6 degrees of freedom and accuracy of 1.5 μm. The reticle stage is designed to ensure a high degree of accuracy and precision throughout the production process. Moreover, its position control asset coupled with the environmental control model ensures a stable environment and minimizes noise levels during the production cycle. The equipment also integrates NIKON Adjustment Method (NAD) which ensures automatic adjustment of the optical system as well as the mechanical balance of the machine. This further ensures a greater accuracy of pattern imaging. NIKON NSR also boasts NIKON Step-and-Repeat (NSR) Unit which enables a wide range of application scenarios, such as stepping multiple chips on one wafer in one imaging cycle. The optics of the machine are configured of two off-axis, two axicons, one aberration corrector and one safety lens. This configuration ensures superior imaging performance with a wide range of working distances. The tool is also equipped with a continual cell optical asset which enables high speed pattern imaging with a reduction in exposure time and high productivity. NIKON NSR wafer stepper has been designed for optimal process integration. It is capable of providing a fully automated production cycle which includes hardware model check and alignment as well as mechanical and optical tuning. In addition, the equipment also supports a wide range of pattern correction algorithms as well as the ability to adjust the exposure settings during the production process. Overall, NSR wafer stepper is capable of enabling efficient IC production cycles with a high degree of accuracy and productivity. Its innovative features make it an ideal choice for chip level production and continue to offer superior performance and quality in the semiconductor industry.