Used NIKON / NTS NSR-2150 #293650967 for sale

NIKON / NTS NSR-2150 is a high precision wafer stepper primarily used for the lithography process in semiconductor wafer fabrication. It operates on the double-exposure step-and-repeat principle and provides resolution down to 0.3 μm at an overlay accuracy of 1/2 of a μm. The machine is compact yet versatile, and features power-conserving designs including a high-speed 0.275-second reticle exchange equipment and an 'intelligent' heater control for the stage heater. NTS NSR-2150 utilizes a long life 6″ F2.4 optical system and twin eyepieces to ensure consistency. The unit also allows manual focusing, and has a resolution of 1st order telecentricity at a wavelength of 436 nm, achieving levels of a 1/2 μm overlay accuracy and 0.4 μm edge detection accuracy. The stepper's stage has a maximum stroke of 300 × 300 mm, and is driven by a digital-controlled movable stage with high-accuracy digital optical encoders and temperature sensors. It also includes auto-home, stage-error corrections, and adjustable spindles. The stage's axis components are set in a symmetrical configuration to ensure precise and simultaneous X/Y motions. NIKON NSR-2150 is designed to handle complex pattern exposure with a variety of algorithms, such as rotate, mirror and Asymmetric Multiple Inverse Scan. Additionally, several lens correction and compensation functions are available to improve shot exposure, such as variable programmable feature correction and dynamic flare compensation. The stepper also has a graphics-oriented user interface, which makes operating the machine easier and more intuitive. NSR-2150 is highly reliable, with a design life of 10 million shots, and is ISO-certified in accordance with the international performance and safety standards. Additionally, the stepper has a built-in event log to track, store and review past processes—safeguarding both data integrity and product quality. In conclusion, NTS-2150 is a powerful and precise wafer stepper with the features and capabilities necessary for modern semiconductor wafer fabrication. It is fast, reliable, and relatively easy to use, enabling more efficient, cost-effective and high-precision manufacture of integrated circuits.