Used NIKON S202 #293825804 for sale
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ID: 293825804
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Renesas upside: +8K/m tool
DUV (Non-Critical, 4X Scanner, KrF)
Host station.
NIKON S202 is a wafer stepper developed by NIKON Corporation, a leading manufacturer of advanced imaging and precision equipment. It is designed for use in semiconductor fabrication processes, such as photolithography, used to manufacture integrated circuits (ICs). The stepper features a 6-field optical equipment with a variety of optical components that allow multiple exposure from different angles, enabling repeatable pattern accuracy. The illumination system includes a 6-position zoom lens that provides an exposure field size from 0.75 to 8.0 mm, and the exposure time can be selected from 3 to 10 seconds. Additionally, it is equipped with an automatic alignment unit with highly accurate stage device for optimal alignment of the wafer and the mask. S202 also features a user-friendly operation panel, with a colorful LCD monitor to provide excellent visibility. The stepper is equipped with environmental sensors, such as a temperature detection and a few air-flow sensors, to provide a stable operation environment. This machine also has an automatic calibration and monitoring tool, providing a rapid and precise fine adjustment of the optical field alignment anytime with a maximum of accuracy. The data transmission is done by using a gigabit Ethernet and USB connection for easy integration with external data systems. The stepper also has a special feature known as the output defect sensor which can detect presence of particles, foreign matter or other defects on the resist surface. Moreover, NIKON S202 has a built-in cooling asset that significantly reduces the exposure running time and power consumption for controlling the high temperatures generated during the exposure attaining operations. The stepper is also lightweight, with a compact design that allows small-sized wafer alignment which is ideal for prototyping applications. The stepper is also equipped with software to provide data management and has a remote control on the touch panel for easy operation and convenience. Furthermore, it features job memory storage and automatic mask plate exchange for increased production efficiency. All in all, S202 is a well-designed wafer stepper with a variety of features that make it ideal for use in photolithography processes. It is highly precise, efficient, and user-friendly, making it a great choice for a variety of IC fabrication operations.
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