Used NIKON S202 #293825805 for sale

NIKON S202
Manufacturer
NIKON
Model
S202
ID: 293825805
Scanner Renesas upside: +8K/m tool DUV (Non-Critical, 4X Scanner, KrF) Host station.
NIKON S202 is a wafer stepper designed to accurately print, pattern and inspect semiconductor masks. It is capable of displaying high levels of resolution, accuracy, uniformity and line edge quality, even at high levels of throughput. S202 has dual 4-degree scanners and a 150mm stepper that provides high-speed scanning. This enables rapid wafer throughput and superior line and edge quality. The stepper is equipped with three stages of motion control, including the main stage that supports translation, scanning and rotation functions with a +/- 2 degree tilt range. NIKON S202 is capable of printing and inspecting wafers with quartz masks up to 200mm in diameter and with quartz layers as thin as 0.2 microns. The stepper has 12 fixed-field, high-accuracy lenses for mask printing and inspection along with two different inspection modes for precision geometrical defect measurement. S202 features an automatic alignment system for both Quartz CD and Metal CD layers. It also has various restrictions for placement and alignment, allowing automated CD measurement and defect detection. The stepper also has an advanced Clean Room Room Management System that helps maintain air cleanliness and particle control, providing a superior level of environmental quality control. NIKON S202 is a versatile wafer stepper. S202 has a multiple-resolution capability along with a mask-diffraction generator and a diffraction grating system that allow the printing of patterns with high degrees of accuracy. It is capable of showing excellent levels of line edge quality and stripes even at the slightest level of production. NIKON S202 is an ideal choice for high-volume semiconductor manufacturing. The stepper has excellent operating temperature stability, multiple alignment and resolution capabilities and superior line edge quality, allowing maximum performance and enhanced quality. With its superior speed, quality and resolution capabilities, S202 is the perfect choice for wafer steppers.
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