Used NIKON / TEL / TOKYO ELECTRON NSR 1755 G7A #9299967 for sale

NIKON / TEL / TOKYO ELECTRON NSR 1755 G7A
ID: 9299967
Wafer Size: 6"
Vintage: 1990
Steppers, 6" 1990 vintage.
NIKON / TEL / TOKYO ELECTRON NSR 1755 G7A is a deep ultraviolet (DUV) stepper that is used in semiconductor fabrication processes. Its 300mm stepper platform offers high throughput and excellent uniformity in wafer patterning processes, as well as high accuracy and resolution for the manufacture of leading-edge, ultra-fine features. The machine is capable of patterning up to 24 layers of dense circuits on a single wafer. TEL NSR 1755 G7A is capable of operating at a wavelength of 248nm, and features a large field size of up to 21 × 24 mm2. The field uniformity across the entire area is very impressive, reaching 0.3 percent or better at the actuator level. This results in extremely high overlay accuracy throughout any patterning process run on the machine. The G7A has a step and repeat system for layer mapping, which ensures precision alignment when placing die on the wafer. It also features a built-in optical distortion compensator to minimize edge distortion during the exposure and a local focus monitor for continuous performance optimization. The stepper is equipped with three metrology systems, allowing it to quickly detect crucial dimension (CD) values and compensate for potential errors. The G7A is highly reliable and does not require significant maintenance. It has a mean time between failures (MTBF) of 13,800 hours, compared with 10,500 hours for the earlier model, and can handle 450 wafers in 24 hours. It also operates smoothly at temperatures ranging from 10 to 28 degrees Celsius, with a relative humidity of 60 percent or less. Combined with its high accuracy and uniformity, NIKON NSR 1755 G7A is an ideal choice for the production of next-generation critical patterning applications. Its fast throughput, great resolution, and reliable performance make it an excellent choice for semiconductor manufacturers.
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