Used PRECISION / GCA 19 #9081984 for sale
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PRECISION / GCA 19 is an advanced automation semiconductor lithography wafer-stepping equipment. This equipment is part of a production line of integrated circuits (ICs), combining photolithography, mask alignment, and automated wafer handling in one system. The large frame of GCA 19 measures around 116 cm in height, 203 cm in width, and 41 cm in depth. It has a 5 axes of motion (X, Y and Z-axes, and two theta-axes) for the stage used to align the wafer. The two theta-axes give the unit the capabilities to rotate and tilt the wafer plane and move it into different angles for automatic alignment. The machine uses light reflected off of the mask and directed onto the wafer to produce alignment and lithography. It employs a three-point geometric feature-based alignment tool and a patented 'plane rotation' technique that can accurately align and position wafers with two angular tilt and two lateral rotation axis. The three-point geometric asset allows for precise alignment of patterns and accurate overlay of various wafers. PRECISION 19 also uses an internally cooled argon/fluoride laser with an ultra-short pulse length for illumination, allowing for maximum exposure of the wafer surface without the risk of heating or damaging the material. The laser model is also capable of exposing wafers at various wavelength ranges, which allows for better handling of multiple different materials and layers. The equipment has a built-in high-speed alignment scope, enabling an automated system that allows for fast and accurate operations. Additionally, the unit uses several sensors to monitor and adjust the exposure level of the laser, and has a large touch-screen interface for user input. This allows operators to control different stages of production and get reliable results. In short, 19 is a reliable and accurate production line wafer-stepping machine, utilizing light and laser instruments to accurately align and lithograph wafers. With features like the built-in, high-speed alignment scope and its internal cooling tool, PRECISION / GCA 19 is designed for fast, accurate production.
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