Used SCIVAX Flan-200-U100-4 #9205055 for sale

SCIVAX Flan-200-U100-4
ID: 9205055
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SCIVAX Flan-200-U100-4 is an automated wafer stepper that provides precision alignment and exposure of semiconductor wafers during the photolithography process. It can process up to 4 wafers simultaneously in a 200 mm size - the largest capable wafer size available. It offers a facilitating environment for its users with bench-top layout, manual cassette loading, up to 4-sided alignment, a batch scheduler program, and a high-precision stepping mechanism. Flan-200-U100-4 can be used for a wide range of photolithography applications such as deposition, ashing, and etching on wafers. It has a wide adjustable illumination window and can expose wafers up to 2000 mm size. Additionally, its light source and detector units are configured to ensure consistent and accurate exposures and orientations of wafers. The Batch Scheduling System and Image Capture Program further simplify the stepper's operations. The stepper has several features that allow for repeatable processing of wafers, such as an Automatic Exposure Program, Automatic Registration, Automatic Recognition, and Automatic Sequential Exposure Alignment. All of these enable the stepper to automatically process wafers, without requiring user control. Furthermore, all of the stepper's operations are supported with a low noise level and the stepper remains cool (33-35°C) during usage due to its efficient liquid cooling and air exhaust systems. Its X/Y table is highly accurate, allowing for 1um and 0.1 degree alignment, with superb repeatability in both X and Y axes and a full-featured teach-in interface for easier programming of integrated vision system rectification programs. It has two light sources to provide optimal exposure of the wafers, with a mercury-xenon short-arc lamp with 1000W or a krypton-xenon lamp with 500W options for a wide latitude of exposure times. The stepper also includes an AMHS Robot Contro Interface (ARC-2) that is used to automatically and accurately mount wafers for the exposure process without manual intervention, and an automated developer unit that is used to detect and detect errors for the best wafer results. As part of its safety measures, SCIVAX Flan-200-U100-4 is provided with an emergency stop switch that automatically stops the light source and detector units when raised, as well as a filter to block dangerous ultraviolet light emitted during operation. The stepper also has a built-in laser safety protective cover that alerts the user to any perceived hazard, shutting down the light source and detector units automatically if required. Flan-200-U100-4 is an automated, high-precision wafer stepper that provides automated alignment, exposure, and registration of semiconductor wafers. With its multiple safety features, user-friendly interface, and robust build, SCIVAX Flan-200-U100-4 is an excellent choice for photolithography processes.
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