Used SVGL Micrascan MPT #9246179 for sale

Manufacturer
SVGL
Model
Micrascan MPT
ID: 9246179
Wafer Size: 8"
Scanner, 8" DUV, 193 nm Catadioptric lens (Reflective and refractive optical elements).
SVGL MicroScan MPT is a fully automated wafer stepper designed to reduce non-productivity and improve the wafer throughput from the beginning of the process. It offers a fully automated, high-speed and reliable mixed-product handling capability. Its software also allows for precise positioning and focusing of wafers for rapid execution of lithography applications. The stepper features dual-axis motion control with three core axes for superior accuracy and performance. Its mechanical design consists of an advanced high-resolution galvanometer scan equipment for adjustable scan speed and an adjustable resolution, allowing for precise positioning and targeting of wafers. Its optics include a precision CCD camera, high-resolution lenses, and advanced lithographic lenses for superior resolution and accuracy. The MicroScan MPT's control software includes a variety of automated routine tests and feedback features that enable continuous and precise control to ensure the highest quality prints. It offers an array of production monitoring features that offer detailed output of step motion, wafer alignment, and errors. It also features a range of data logging capabilities that allow users to analyze performance and identify any potential problems. The stepper supports a variety of product formats, from large format 200 mm to 300 mm wafers, and utilizes an extensive library of lithography templates. Its automated device diagnostics monitor all faults, ensuring that any errors are quickly detected and addressed. The MicroScan MPT is designed for highly reliable operation and quick cycle times to improve production throughput. The stepper includes a robust safety system, including an emergency shut-off feature, to protect personnel and equipment in case of an emergency. The stepper's user-friendly interface and simple setup makes it easy to start using the equipment. Its advanced control unit enables robust configuration and real-time monitoring of all machine parameters during processing. The machine also includes an in-situ track-and-trace for traceability of wafers in each step of the process, data logging, and historical archiving. Overall, SVGL MicroScan MPT provides a robust and reliable solution for heterogeneous processes, allowing for efficient processing times and highly accurate prints. The stepper delivers high-resolution, repeatable results and comprehensive diagnostics to ensure high-quality production and reliable operation.
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