Used ULTRATECH 1000 #9396748 for sale

ULTRATECH 1000 is a high-precision wafer stepper designed to provide superior performance and repeatability for the fabrication of advanced integrated circuit devices. The stepper offers fast and accurate lithography imaging to enable precise patterning and die placement for high-yield production. 1000 incorporates advanced pattern recognition and advanced optical systems, including digital auto focus, direct capture camera, air bearing stages, and advanced substrate and die mapping. Its widefield imaging equipment is truly multi-patterning capable, allowing efficient multi-exposure via one patterned die. The extreme ultraviolet (EUV) source utilizes a 300 watt light lamp, capable of producing up to 535 nm wavelength resolution. ULTRATECH 1000 has an impressive linear motor driven stage which guarantees a fast scan speed of up to 341 mm/sec. Its quick-lock exchangeable optics provide superior imaging capability of up to 10 um pitch. Laser VisionMap System technology offers a vision guided auto registration of up to 0.1 µm for die placement accuracy. The EUV light source can be integrated with an optional stop-and-go kinematic reticle handling mechanism to ensure minimum time wastage during reticle exchange. The installation's MAGNA-Seal N2 purge unit ensures reliable protection against airborne contamination. The stepper's modern, integrated control functions include tool alarm sensing, automatic pattern placement, auto-focus calibration, Overlay Management Machine, and SEMI compliant wafer geometry. Its tool to tool bleed optimization feature controls the air-bearing in order to enhance the performance of the tool. 1000 also offers improved defect handling capabilities and support for multiple sensors and independent vacuum controls. Thanks to its high-level integration of advanced technologies, ULTRATECH 1000 offers superior repeatability and improved yield rate for advanced IC device fabrication processes. Its fast process performance and high-level production throughput enables rapid prototyping and enables cost-effective production of multi-layer devices. The stepper is equipped with advanced software modules and is compatible with several lithography fabrication tools.