Used ULTRATECH 1100W #131417 for sale
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ID: 131417
Wafer Size: 6"
Vintage: 1989
Wafer stepper, 6"
Oblong chucks
Fitted with small cross masks for better alignment accuracy is a 1:1 projection
Lens quoted in the range of 0.9 to 1.25 depending on Numerical aperture, but for production 1.25 micron
Operation and maintenance manuals
Last software installation 2004
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1989 vintage.
ULTRATECH 1100W wafer stepper is a powerful tool used in the semiconductor production process to print microstructures onto wafers. Utilizing a light-based scanning approach, it produces a continuous line of printed features with precision and repeatability. This stepper provides high accuracy and feature resolution and enables quick and efficient wafer processing. The equipment features a modular structure consisting of a base and a light-guide which is adjustable in height. It features easy alignment with a laser sighting system and can expand its 10K-12K W/cm2 programmed intensity range to a maximum of 30K-35K W/cm2 without any need for additional accessories. It accurately records feature start and end position with 1.5 μm reproducibility. The stepper is designed with an advanced motion engine to ensure speed and accuracy of the wafer at all times and can easily integrate in all tooling systems. Its design, mechanical structure, and control unit satisfy the requirements of high precision and consistent performance. Additionally, the stepper is equipped with safety features such as over-temperature protection, over-pressure protection, and auto-detection of any process failure. It features advanced sensing technology capable of auto-detecting small features as minute as 6 μm and featuring as many as 16-step rotation. The machine can also be integrated with third-party wafer sorting systems for easy wafer-handling. 1100W wafer stepper provides exceptional process control, enhanced yield, and extended product life, making it an ideal choice for semiconductor production. It is an essential tool for the continued development of the semiconductor industry.
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