Used ULTRATECH 1500 MVS #293751911 for sale

Manufacturer
ULTRATECH
Model
1500 MVS
ID: 293751911
Stepper.
ULTRATECH 1500 MVS (Multi-Vendor Stepper) is a state-of-the-art advanced technology photolithography tool, capable of high-resolution imaging, layer generator, multi-wavelength exposure and high productivity, used to manufacture semiconductor integrated circuits (ICs). The stepper equipment is an opto-mechanical tool, containing a high-resolution lens and imaging system, an illumination source, a stage for making predetermined moves, and a reticle chuck. The stepper relies on high-resolution optics and layered geometry to etch the product's pattern onto the wafer. 1500 MVS has a high-contrast and high-resolution photo alignment unit with differential interference contrast (DIC) imaging, stepper machine telecentricity that assures high accuracy and a high ratio of reticles and wafers that this technology can process in applications of up to 23nm resolution. The multi-wavelength exposure capabilities of the stepper tool allow for imaging of multiple layers and substrates, with wavelength combinations ranging from ultraviolet (UV) and extreme Ultra Violet (EUV) imaging. Furthermore, layer generator and dynamic optical proximity correction (OPC) technology offers the ability to rapidly analyze the pattern images and create corrections on the fly. The asset also offers the user the ability to configure a complex array of settings, such as the wafer size, pattern size and layer, depending on the application and the design requirements. ULTRATECH 1500 MVS also includes a number of advanced features to maintain a clean chamber environment and guarantee high quality imaging and wafer stepping processes. It offers multiple stepper motion control options, including a position feedback model for accuracy, a motor control center for motor work flow management and an axis control equipment for coordinating motion of the stepper motion system. The unit also offers advanced process analysis techniques such as process control software for user-defined process settings. In order to ensure consistent results and superior quality, 1500 MVS uses multiple viewfields, which feed calibrated information from the imaging machine into the controller. This allows the user to verify all areas of the pattern, as well as detect any process defects that may require correction. ULTRATECH 1500 MVS is an advanced lithography tool that offers superior imaging resolution, high throughput, and reliable and repeatable results. This tool is ideal for semiconductor device fabrication and its advanced features make it a powerful and effective tool in the production process.
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