Used ULTRATECH 1500 MVS #9188725 for sale

ULTRATECH 1500 MVS
Manufacturer
ULTRATECH
Model
1500 MVS
ID: 9188725
Vintage: 1997
Stepper 1997 vintage.
ULTRATECH 1500 MVS is a stand-alone wafer stepper specifically designed for high volume, low cost wafer reticle exposure. The stepper is capable of delivering precise alignment to feature sizes as small as 0.2 micrometers. It has a unique Scanning Mask Aligner design which ensures superior uniformity of illumination over the entire field, and the Mask Head is equipped with a patented solution, the scanning position lock (SPL) mechanism, which ensures wafer alignment accuracy and substantially reduces webbing and distortion effects. 1500 MVS system features a multi-stage indexed stepper platen technology, capable of delivering a throughput of 650 wafers per hour in a single pass, and a highly stable and low distortion xenon mercury light source with adjustable power and pulse widths. This system has a Repeatability of +/- 2 microns in all axes, which is extremely precise for its class. Furthermore, ULTRATECH 1500 MVS also comes with a variety of powerful features such as AutoFieldAlign, which enables real-time auto-correction of field distortion; MultiFlash, which allows programming of up to 20 sequences of multiple exposures from single coating plates; and Adaptive Exposure, which uses an advanced optical sensor to monitor wafer alignment on-the-fly and automatically adjusts illumination accordingly. 1500 MVS is a reliable and cost-effective solution for wafer reticle exposure, especially for the needs of high volume production. Its stable xenon light source ensures consistent illumination levels, while its flexible programming options and real-time auto-correction features ensure accuracy and repeatability. It is the perfect system for short-term projects, frequent product changes, and for producing high-quality wafer reticles with unbeatable precision.
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