Used ULTRATECH 1500 MVS #9256268 for sale

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Manufacturer
ULTRATECH
Model
1500 MVS
ID: 9256268
Vintage: 1996
Stepper Robot handler, 6" (Upgradable to robot handler, 2"-8") 1996 vintage.
ULTRATECH 1500 MVS is a wafer stepper, or a lithography machine, designed for the fabrication of semiconductor devices. The machine utilizes a step-and-repeat process to expose finely patterned adhesion layers and photoresist-coated substrates with part geometry features and structures ranging from sub-micrometer to macroscopic. The system features a wide range of user-selectable substrate sizes with autofocus capability to ensure accuracy. 1500 MVS utilizes a programmable dual-axis scanning motion system for mask alignment and measurement accuracy throughout the entire scanning range. Its advanced scanning technology and resulting stability permit the exposure of smaller and smaller features on chips. It also provides a truly uniform scan velocity throughout the full scan range. The stepper is equipped with a cathode ray tube-based wafer stage capable of a 20-μm pitch accuracy, motion range of 100 × 100 mm (or larger) and scan speeds of up to 500 mm/second, allowing for fast and precise wafer positioning and alignment for lithography. The machine additionally features an auto-focus capability, which helps further improve alignment accuracy and repeatability. The overall system is constructed with a modular design, allowing for easy custom configurations and quick setup. Its "lean design" also reduces the amount of unnecessary parts and parts wear, offering a more reliable machine that runs fewer maintenance cycles and provides improved productivity with minimized downtime. An additional feature of ULTRATECH 1500 MVS is its adjustable automatic tilt positioning capabilities, allowing for compliance with various substrate surfaces and components. The stepper is also designed to run up to 160 wafers per hour with automated cassette loading/unloading and a barcode reader, enabling highly efficient and precise lithography performance. In conclusion, 1500 MVS is an excellent wafer stepper that provides reliable and repeatable performance. The machine is extremely fast, easy to set up, and can handle all types of substrate sizes with its adjustable tilt capabilities. It is the ideal machine for any lithography process.
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