Used ULTRATECH 1500 MVS #9306125 for sale

ULTRATECH 1500 MVS
Manufacturer
ULTRATECH
Model
1500 MVS
ID: 9306125
Vintage: 1996
Stepper 1996 vintage.
ULTRATECH 1500 MVS wafer stepper is a high-precision machine used in the lithography and circuit fabrication process. It is designed to quickly and accurately expose patterns onto several different types of semiconductor wafers. 1500 MVS is a 3-axis lithography machine that utilizes a computer-controlled stage with a + or - 5 micron precision range. It features a precision 6-axis rotary motion stage with 0.5 arc second resolution. This enables the user to precisely control the exposure, placement, and angle of the wafer stepper's laser. ULTRATECH 1500 MVS incorporates a high-resolution variable-power laser (with wavelengths of up to 10.6μm), which produces temperatures up to 10,700°F. The machine also features a "blanket" feature, which helps to minimize energy loss from the laser by conforming the laser beam to the wafer size. This helps ensure a uniform exposure. 1500 MVS wafer stepper is capable of rapidly exposing patterns with high fidelity. It can expose masks with up to 10 lines per mm. Additionally, the machine can accurately expose wafers with aspect ratios that vary from 0.1 to 4.4. The machine is also equipped with a multi-zone and a coarse/fine alignment system, making it ideal for applications with varying clearance requirements. The alignment system helps to ensure that the exposure areas on the wafers are in precise alignment. Furthermore, it features software programs that allow the user to modify the exposure parameters on the fly. ULTRATECH 1500 MVS is designed to maximize throughput by providing a quick load/unload time and a high stage speed (up to 0.3 mm/sec). Furthermore, the machine is engineered to efficiently and accurately handle various wafer sizes and patterns. 1500 MVS is an advanced and reliable wafer stepper. Its computer-controlled stage, high-resolution laser, multi-zone alignment system, and fast loading and unloading capabilities make it ideal for mass production operations.
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