Used ULTRATECH 1500 WAS #9302572 for sale

ULTRATECH 1500 WAS
Manufacturer
ULTRATECH
Model
1500 WAS
ID: 9302572
Vintage: 2010
Stepper 2010 vintage.
ULTRATECH 1500 WAS Wafer Stepper is an advanced tool used to generate photomasks with very precise features for photolithographic applications. This tool can produce features ranging from 15-150nm, and is ideally suited for semiconductor device processes. It is composed of several distinct subsystems, including a scanner, stepper motor, reticle stages, and software. The scanner functions as the input device and lens system, and acts as a light source for the stepper. Its precision optics use UV radiation to provide a uniform light spot size to the wafer, and is adjustable to conserve energy while still providing the necessary UV light for each process step. Additionally, the scanner can scan a reticle up to 2.25-inch-square in size and is adjustable to meet tolerance requirements. The stepper motor is a direct-drive stepper motor that provides positional accuracy and repeatability. It is equipped with an inertial motor to ensure a smooth, vibration-free performance while moving the reticle stage. The reticle stage holds the wafer in place while the stepper motor moves it in increments as small as 1/10th of a millimeter. Next, 1500 WAS Wafer Stepper utilizes an advanced software package for controling the stepper and the light levels for each step in the process. The software package is designed to maximize the efficiency of the process and reduce total cycle time. It allows operators to select a variety of processes for creating photomasks, ranging from uniform 4x reduction to very limited focus range. Furthermore, the software can automate the setup and execution of the process, eliminating the need to manually adjust settings. Finally, ULTRATECH 1500 WAS Wafer Stepper provides a high degree of reliability, accuracy, and repeatability. Its inertial motor system dampens motion while its direct-drive stepper motor ensures secure reticle positioning. Furthermore, its precision UV optics provide a consistent light spot size to the wafer throughout the process. Additionally, 1500 WAS Wafer Stepper is easily integrated into existing semiconductor processes to maximize efficiency. In conclusion, ULTRATECH 1500 WAS Wafer Stepper is an advanced tool capable of producing precise photomasks with high repeatability. Its inertial and direct-drive stepper motors ensure accurate reticle positioning while its precision UV optics provide a uniform light spot size for the process. Additionally, 1500 WAS Wafer Stepper is easily integrated into existing semiconductor processes, making it an excellent choice for photolithographic applications.
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