Used ULTRATECH 1500 #9019176 for sale

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Manufacturer
ULTRATECH
Model
1500
ID: 9019176
Wafer Size: 5"
Stepper, 5".
ULTRATECH 1500 is a type of wafer stepper used for the fabrication of semiconductor devices, such as computer chips. It is a dedicated equipment designed for one-step lithography in the sub-micron range. 1500 wafer stepper utilizes focused and high energy UV light, which is produced by a specialized laser arc system. This UV light is used to expose a photoresist layer that has been spin-cast onto the surface of the wafer. The wafer can then be immersed in a chemical developer to selectively reveal microstructures formed in the photoresist layer. ULTRATECH 1500 wafer stepper includes alignments, patterning, overlay monitoring, focus alignment and particle control. It also has an upper stage that includes a laser head-rotator and a centering mechanism. The rotator allows for the laser to move in x, y, and z axes for better resolution and placement accuracy in the features of the final microstructure. The centering mechanism ensures an exact alignment of the laser with the wafer. The unit also includes a light source, which may be a lamp, or a laser, depending on the needs of the project. The source is coupled to a collectivity grating machine, which allows for the light to be split into two beams, which then converge in the exposure area of the stepper. This maintains a high accuracy of feature placement on the substrate. An advanced imaging tool is also included in the stepper. This includes a CCD camera that takes images of each microstructure before, during and after exposure. These images can then be compared to a calibration frame to ensure the accuracy and quality; and can be used to measure the size and shape of each feature. Other features of 1500 wafer stepper include a particle control asset that removes contaminants from the air, thereby eliminating contamination of the photoresist and features. Through the use of an OLP (Optical Low Pass Filter), the stepper is also capable of compensating for distortions caused by a reduction of energy intensity which could lead to unwanted exposure artifacts. Finally, the stepper also includes a high-accuracy wafer-handling model, which provides for quick and precise positioning of the wafer over the pattern. All these features make ULTRATECH 1500 an excellent choice for microchip production.
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