Used ULTRATECH 1500 #9019700 for sale

ULTRATECH 1500 is a wafer stepper designed to help meet the exacting device placement demands of semiconductor manufacturing. The stepper uses advanced electron beam (e-beam) lithography tools to deliver high alignment accuracy and repeatability with fast throughput rates. The equipment features a high acceleration linear motor stage, enabling short scan time while maintaining high resolution and repeatable accuracy. 1500 also utilizes ULTRATECH proprietary Saber™ alignment system to ensure precise x-y alignment while meeting challenging throughput requirements. ULTRATECH 1500 features a M4K e-beam column with a resolution of 1-2 nm and a field size of 450 mm x 450 mm. This single e-beam column is capable of consistently generating lithographic structures of 40 nm and below. To further increase throughput and reduce turnaround time, the stepper also offers a self-calibrating unit. This machine will automatically calibrate the M4K e-beam column and perform a "tuning" operation after each job prior to the next expose. 1500 employs a fully integrated closed-loop wafer handling tool that integrates sensorless alignment, virtual alignment, and focus measurement to achieve high placement accuracy and throughput. By using proprietary embedded alignment tools, the stepper can self-align the wafer to a known reference, eliminating manual alignment processes that can reduce throughput. The closed-loop asset also facilitates in-line focus correction, automated wafer alignment, and low cost mask changes. ULTRATECH 1500 is highly configurable and offers several options to customize its performance to meet unique production needs. Options on offer include a dual e-beam column, an ultra-large field option, and SubSaber™ sub-sampling and alignment. An Enhanced Performance Platform (EPP) is also available, enabling users to reduce scan times and increase resolution and accuracy. In addition to its features, 1500 is also highly reliable and robust, delivering robust throughput quality results. The model's automated calibration ensures repeatable performance, and the platform's proactive security feature helps to protect sensitive data. The stepper also can be complemented by ULTRATECH arsenal of software and hardware options, allowing the equipment to be tailored for a wide range of application needs. ULTRATECH 1500 is a versatile stepper that can help semiconductor manufacturers achieve precise device placement requirements faster and more reliably than ever before. The system's high acceleration linear motor stage enhances placement accuracy and throughput rates, while its proprietary Saber™ alignment unit and SubSaber™ sub-sampling and alignment features help reduce manual processes. The machine also boasts an array of performance-enhancing options, making it extremely customizable. Finally, the stepper's automated calibration, self-alignment, and in-line focus correction capabilities provide manufacturers with peace of mind that their devices will be placed accurately every time.