Used ULTRATECH 1500 #9098742 for sale
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ID: 9098742
Wafer Size: 6"
Vintage: 2000
Stepper, 6"
Currently de-installed
2000 vintage.
ULTRATECH 1500 Wafer Stepper is a high-precision, computer-controlled machine used to print, inspect, and expose integrated circuit components onto the surface of a wafer. This machine is capable of printing with accuracy far beyond the limits of conventional setups, allowing for extremely precise placement of circuit elements. 1500 utilizes a high-powered source, such as an Excimer laser, to selectively expose feature sizes as small as 0.1 microns. It features an encoder-stabilized 2-axis stage for greatly reducing stepping errors, and a specially designed high-resolution Z-stage for controlling the focus of the laser. The stepper's software package allows for precise control of the printing process, and includes sophisticated alignment and editing capabilities. It includes a precise autofocus mechanism that allows for automated focusing of the laser beam on the wafer surface to an accuracy of +/- 0.01 microns. The most significant feature of ULTRATECH 1500 is its unique image centering equipment. This system utilizes a combination of MEMS systems and advanced laser optics to accurately center each image on the wafer, eliminating the need for manual centering. 1500 is designed to work in conjunction with ULTRATECH Versatile Processing Unit (VPS), which allows for the flexible placement of multiple layers of printed circuitry. This machine allows for the integration of several different types of automated surface processing systems, including etching, sputtering, and ion-implantation. ULTRATECH 1500 has been specifically designed for repetition accuracy, making it ideal for mass production. Its impressive speed and accuracy make it the perfect choice for high-precision applications requiring significant throughput. In addition, 1500 features a self-diagnostic tool which allows it to detect and prompt the operator when an adjustment or calibration may be necessary. Overall, ULTRATECH 1500 is an advanced wafer stepper, designed to provide highly accurate, precise, and reliable results. It is available in a variety of sizes, configurations, and price points, making it an ideal solution for semiconductor production.
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