Used ULTRATECH 1500 #9098746 for sale
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ID: 9098746
Wafer Size: 6"
Vintage: 1994
Stepper, 6"
Currently de-installed
1994 vintage.
ULTRATECH 1500 is a high-performance, advanced wafer stepper equipment that helps manufacturers produce precision micro-devices with a higher yield. It is the industry standard in wafer fabrication equipment and is used to produce integrated circuit devices, MEMS, thin films, as well as other micro-electronic components. 1500 system features a large exposure area of up to 20-inches by 20-inches and a high-accuracy alignment stage allowing for up to one micron of alignment accuracy. The unit comes with a choice of either KrF or ArF lithography sources from 248nm to 384nm. It also incorporates a WSCAN technology which provides consistent resolution, unparalleled pattern uniformity and a wide range of illumination options. ULTRATECH 1500 also makes use of the latest in automation tools, including a computer-controlled wafer handling machine and an automated focus monitor. For films and other substrates, its automated wafer prober ensures precise placement, even in the presence of significant height variations. Additionally, 1500 tool utilizes the latest in imaging technology including high-resolution CCD cameras and proprietary image enhancement algorithms to process the image for inspection or resist development. It also features a built-in metrology asset that is capable of measuring film thickness and locating defects. Finally, ULTRATECH 1500 is a reliable model that comes with a range of excellent safety features to protect operators and the environment from hazards. These features include an automatic equipment shutoff when the system detects abnormally high temperatures, light leaks, or any other hazardous conditions. Overall, 1500 is an advanced wafer stepper unit that provides manufacturers with reliable, accurate and precise results. With its large exposure area and a range of automated features, it is the industry's most capable and reliable machine for producing micro-devices with a higher yield.
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