Used ULTRATECH 1500 #9098778 for sale
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ID: 9098778
Wafer Size: 6"
Vintage: 1998
Stepper, 6"
Currently de-installed
1998 vintage.
ULTRATECH 1500 is a wafer stepper developed for high throughput lithography requirements in the semiconductor industry. This stepper utilizes the latest in contact aligner technology to produce high resolution images with repeatable precision and uniformity. Its advanced resolution capability enables manufacturers to achieve smaller line widths and tighter alignment tolerances. 1500's aligner technology enables the user to quickly and easily move the wafer from its native position to a specified starting point on the alignment robot. This wafer stepper also features a high-resolution interferometric pattern recognition equipment which ensures all alignment objectives are met with consistent accuracy. Its fast and easily adjustable step sizes enable the user to accurately step over multiple-fields without sacrificing accuracy. Additionally, its flexible stage and motor configuration allows for horizontal, vertical, and rotational motion. This enables users to scan an entire wafer surface in a single machine cycle. Furthermore, this stepper provides advanced patterning capabilities, allowing users to generate highly sophisticated lithographic patterns with simple motion commands. ULTRATECH 1500 also offers users improved flexibility and the convenience of easily interchangeable parts. Its modular design and programmable control unit enable engineers to easily customize the system to meet their application needs. Additionally, the user interface offers an intuitive graphical interface that is easy to use and allows for fast, error-free set up and operation. In addition, 1500 utilizes advanced wet etching technology that ensures high aspect ratio designs can be achieved. This allows for greater pattern flexibility and improved process control. With an upgraded optical unit, the stepper is capable of achieving a maximum resolution of 0.7 microns for increased pattern fidelity. This machine also provides advanced pattern verification technology that can detect and flag potential errors before beginning the fabrication process. Overall, ULTRATECH 1500 is a state-of-the-art wafer stepper engineered to ensure high throughput lithography and superior versatility. Its advanced features and advanced wet etching technology enable users to achieve the highest precision and intricate patterns.
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