Used ULTRATECH 1500 #9188727 for sale

ULTRATECH 1500 is a high-performance wafer stepper that provides superior imaging performance and productivity. This automated machine is designed for the fabrication of integrated circuit (IC) devices on semiconductor wafers. It features an integrated motor-drive equipment that enables precise control of image stepping and centering. 1500 is capable of supporting different wafer sizes ranging from 6 to 12 inches. It is designed to deliver superior reverse image fidelity at both low and high levels of image power. Thanks to the advanced technologies utilized, ULTRATECH 1500 can achieve faster throughput and improved optical performance. 1500 consists of two main components: an Imaging Station and a High-Precision Stage. The Imaging Station contains a source and projection system, which includes a continuous-wave laser diode, a high-power beam expander, a high-NA projection lens, and an autofocus unit. This imaging machine is capable of providing superior spatial resolution of 20 nm. The High-Precision Stage is responsible for accurately positioning the wafer to ensure proper image alignment and coverage. ULTRATECH 1500 also features an advanced CCD camera for accurate placement of the wafer, and a two-axis motion control tool that allows for precise and repeatable motion of the wafer stage. To further enhance process stability and repeatability, 1500 features an integrated computer asset with software that allows users to program exposure patterns, image sequences, and image parameters. The imaging model also has a built-in metrology equipment for the inspection and analysis of wafers. ULTRATECH 1500 offers outstanding performance and is designed to meet the high demands of IC manufacturers. With its robust design, high throughput, and superior image quality, it is well suited for advanced semiconductor device manufacturing processes.