Used ULTRATECH 1500 #9244742 for sale

Manufacturer
ULTRATECH
Model
1500
ID: 9244742
Stepper With nitrogen.
ULTRATECH 1500 is a fully-enclosed wafer stepping equipment with a uniquely designed mechanical system providing stable and accurate performance. This unit is capable of processing substrates that range in size from 1" (25mm) to 4" (100mm) and is designed to run a range of process gases including oxygen, hydrogen and nitrogen. Its innovative design features a unique sub-second positioning accuracy, allowing for easy and consistent alignment of chips to the substrate. The main components of the machine include a multi-axis scanning platform and a linear drive subsystem consisting of an alternating-current motor and direct-drive (no gears) linear actuator. This arrangement allows for smooth, accurate and fast operation, with a top end speed of 600mm/s and a low acceleration of 4G. The accuracy of the tool is further enhanced through closed loop encoder feedback on all axes, allowing the asset to accurately replicate movements. The platform is driven by advanced software which ensures precise, automated alignment of devices to the substrate and the efficient execution of recipes. The model also features an optional automation package for automated wafer loading and handling, thus eliminating the need for an operator to manually load wafers. As a wafer stepper equipment, 1500 also provides the option to integrate an in-situ gas supply system, allowing for on-the-fly gas purging, venting and pressurization, as well as in-situ laser ablation for failure analysis purposes. Furthermore, the unit can be equipped with an integrated, advanced RTIP (real time imaging processor) to allow for offline inspection and staging analysis. ULTRATECH 1500 is an ideal machine to meet a variety of wafer processing requirements. Its state-of-the-art design and advanced features ensure reliable throughput and high quality products. This tool is perfect for research, small-scale production or even prototyping, delivering exceptional quality at a competitive cost.
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