Used ULTRATECH 1500 #9399241 for sale
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ULTRATECH 1500 is a high-accuracy and ultra-precision wafer stepper used for semiconductor device fabrication. It is designed to provide superior wafer to wafer and wafer to mask registration and deliver exceptional optical overlay accuracy and stability for today's most complex microchip designs. 1500 achieves the high accuracy and ultra-precision required for advanced device fabrication by using a unique combination of advanced optics, motion control, motion mechanics, and software technologies. The advanced optics includes an anchoring grating stage, which enables high-accuracy, repeatable substrate positioning and continuous, curvature-dependent image corrections through the use of a patented off-axis imaging equipment. The system also employs an integrated auto-focus and auto-correction function to maintain high wafer to wafer and wafer to mask registration accuracy with the changing substrate surface. ULTRATECH 1500 utilizes the most advanced motion control and mechanics technologies to achieve high accuracy, repeatability and speed, while making the smallest possible mechanical movements. This includes the use of high-precision linear motors, with very low friction and very low temperature sensitivity, that provide high repeatability and high velocity to ensure optimal throughput. The stepper also incorporates a highly accurate dual-drive motion control unit based on proprietary motion control algorithms and a machine of high-performance servo motors that enables extremely precise and smooth motion. 1500 is set apart from other wafer steppers by its unique combination of algorithms and software technologies that allows for more efficient patterning operations. For example, ULTRATECH 1500 includes its internally developed high-density patterning software that uses its own spatial filter technology to reduce patterning noise contaminations and quantum noise effects, as well as its proprietary synchronization capability that synchronizes the stepper with other equipment in the production process. 1500 has also integrated with top-tier process automation software, allowing users to support high-end feature control, enhance machine throughput, and enable online monitoring and improvement. All of these highly sophisticated and high-performance technologies help ensure best in class item-to-item overlay precision and process accuracy. ULTRATECH 1500 is setting the industry standard for wafer steppers. With its mix of advanced optics, motion control and mechanics, along with powerful software technologies, it offers users high performance, low cost, and improved process optimized for production of the most complex semiconductor devices of today.
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