Used ULTRATECH 2244i #9397143 for sale
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ULTRATECH 2244i Wafer Stepper is an automated wafer processing equipment designed for single-wafer processing up to 6 inches. The stepper utilizes stepper-motor technology, allowing for very accurate and repeatable exposure times. The stepper system also incorporates feature sizes down to 5 microns with resolution on the order of 0.1 microns. The main components of the unit are: the stepper engine, image encoders, wafer handler, focusser, collimator, and shutter. The stepper engine consists of a closed loop control machine, motors and motor drives, and encoders to accurately position the stages during exposure times. The encoders register image position, which allows very accurate and repeatable exposure times, while the wafer handler can hold up to 200mm wafers. The focusser utilizes a two-axis mechanism ensuring consistent focus across the entire exposure field. The collimator is vacuum cooled and designed to minimize the unwanted exposure of pattern edges and also increase resolution of pattern exposures. The shutter is electronically operated and is designed to ensure crisp images and minimize image overlap artifacts. 2244i allows for high-end, highly accurate patterning of circuits for the most demanding applications. This stepper is compatible with standard processes such as Electron Beam Lithography (EBL), Deep Ultraviolet (DUV), Ultraviolet (UV), and E-Beam Writer (EBW). Both manual and automatic methods of data-handling are available, as well as software that allows for tight control of the stepper configuration. Safety features are incorporated to protect both the operator and the stepper, such as safety interlocks, emergency stop, and an audible alarm and external timer. The tool is also designed with power noise and interference protection, short circuit protection, as well as over-temperature control. ULTRATECH 2244i Wafer Stepper is a well-designed and high-performance single-wafer processor designed for demanding applications. The asset has high-resolution and precise exposure times, due to its sophisticated stepper motor-driven stages and encoders. It also is designed with safety features such as emergency stop and alarm, providing a safe and reliable solution for wafer processing. The model's high performance and reliability make it an ideal solution for the most demanding applications.
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