Used ULTRATECH LSA 201LP #9286627 for sale
URL successfully copied!
Tap to zoom
ULTRATECH LSA 201LP is a wafer stepper designed for lithography applications. It is specifically designed for edge-biased illumination and is capable of producing resist lines and spaces down to half-micron resolutions. ULTRATECH LSA201LP utilizes high-performance, linear motor-driven stages for motion control. It is the only available scanner to feature 2-axis moving stages, which allows for the scanning of different shapes and structures on the wafer. This helps achieve the highest levels of repeatable accuracy. LSA 201LP provides a numerical aperature of 0.75 and a field-of-view of 5.4mm, allowing for a wide range of detailed patterns to be achieved. It is equipped with high-resolution optics and is capable of delivering both Constant Illumination and Variable Illumination, along with an integrated auto-calibration feature. LSA201LP also features a Quad-Beam Alignment System (QBAS) that ensures an exact optical alignment of the exposure optics during lithography. ULTRATECH LSA 201LP also includes a light source card, which provides a low-noise power source for the scanner's optical components. This helps reduce pattern defects caused by the noise-induced intensity changes caused by the power supply. In addition, ULTRATECH LSA201LP features an array of automated wafer handling features, such as automatic alignment, image processing, and defect inspection. This helps the user to speed up development processes, while reducing development costs. Overall, LSA 201LP is an advanced wafer stepper that is well-suited for advanced lithography projects. Its combination of high optical resolution, sophisticated automation features, and powerful optics offers a comprehensive system for advanced lithography applications. LSA201LP is ideal for those who need the latest and most advanced stepper technology to achieve optimal results.
There are no reviews yet