Used ULTRATECH Mercury XLS 200 3160 #9228469 for sale

ID: 9228469
Vintage: 1999
Wafer stepper 1999 vintage.
ULTRATECH Mercury XLS 200 3160 is a deep ultraviolet (DUV) wafer stepper designed to meet the highest imaging requirements. This machine is used in the semiconductor industry for inspecting microchips for manufacturing quality control and process optimization. The equipment is equipped with a 10-inch optics stage and 10-inch variable-speed scanning system, allowing for precise imaging and accurate results. Mercury XLS 200 3160 offers a wide range of features to support optimal imaging and analysis for semiconductor production. The unit is equipped with a pair of sophisticated laser focusing guards that help keep the imaging clear and of high-quality. The laser focus guards are designed to detect aberrant alignment in the imaging setup for repeatable and consistent imaging. In addition, the machine utilizes a two-dimensional grating technique that helps take the guesswork out of step-and-repeat production tasks. This technology also helps ensure that rapid, tight-tolerance inspections are successfully achieved with repeatable accuracy. ULTRATECH Mercury XLS 200 3160 is powered by a solid-state lamp, which produces continuous, high-resolution imaging. This lamp also helps to minimize the stray light, which can cause artifacts in some images. In addition, the machine is designed with an advanced optical path for improved throughput and for defect detection. This path helps to reduce unwanted reflections and scattered light to ensure better image contrast. Mercury XLS 200 3160 can be used with a variety of alignment mark systems, including die, substrate, and laser scanning aligners. This allows for imaging over a variety of sizes and substrates, from 556mm to 528mm, and ensures accuracy and repeatability in any imaging scenario. ULTRATECH Mercury XLS 200 3160 is integrated with an automated tool script which allows users to set-up an automated inspection routine with greater ease and control. In addition, the asset features a visual management user interface, which is designed to make the imaging process simpler and more efficient. Finally, Mercury XLS 200 3160 is equipped with maintenance-free electronics, which helps lower operating costs and reduce downtime. This model is designed to integrate easily with other production tools, making it an ideal element for production process optimization.
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