Used ULTRATECH Mercury XLS 200 #9228467 for sale
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ULTRATECH Mercury XLS 200 is a high-performance wafer stepper designed for cost-effective manufacturing of advanced microelectronic devices. It is built for accuracy and reliability, making it ideal for lithography operations to produce dense, complex designs with small feature geometry. The enhanced imaging capabilities of the XLS 200 make it well suited for tight geometries and cutting-edge design features. With a fast scan speed of 4450mm/sec, it offers fast, accurate processing times for even the most densely packed patterns. High resolution optics provide superior uniformity and image quality with 13 nm line width capabilities. The advanced stage handling system enables fast wafer loading and precise alignment while the active front-end ensures low levels of wafer stress. The system is equipped with a sophisticated control system which includes vacuum chamber automated adjust, exposure time measurement control, and contamination control. Automated tuning and optimization functions ensure precise interactions between scanner, exposure source, and wafers for optimal process performance. Auto-focus and focus drift compensation are available with the XLS 200 to maintain high levels of accuracy over time. To improve productivity, the XLS 200 features batch processing with multiple wafer loading and unloading options and a recipe-based user interface. Its detector accuracy and repeatability are unmatched in the lithography systems market and it has been designed with easy maintenance in mind. Mercury XLS 200 is an engineering marvel for wafer steppers, allowing for cost-effective manufacturing and complex lithography operations with accuracy and reliability. Its features and capabilities make it ideal for producing advanced designs for the semiconductor industry.
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