Used ULTRATECH Saturn AP 300 #9163161 for sale

ULTRATECH Saturn AP 300 wafer stepper is designed for advanced photolithography applications in the semiconductor industry and is particularly well suited for high volume applications and rapid device processing. The AP 300 is capable of handling wafers up to 300 mm in diameter, and is equipped with a patented reflux imaging equipment that produces high levels of uniformity in all process parameters regardless of substrate size. The system can reach resolutions down to 0.25 micron, enabling fine-line patterns for advanced device formations. The AP 300 is built with a double pass S-shaped scan stage and two scan axes perpendicular to each other for full wafer coverage. This allows for precisely aligned patterns with excellent repeatability and low distortion. The unit also has a programmable hybrid shutter which can scan different areas of the wafer simultaneously with varying exposure times, stack shots, or exclude independent locations within the field of view. This feature increases throughput and makes the AP 300 well suited for photomask alignment. In addition to its precision imaging capabilities, the AP 300 also features an automated optical alignment machine. High-sensitivity, digital detectors are used to quickly determine and adjust the photomask location and stepper position to within 9um accuracy. This feature reduces setup time and optimizes printing results. The AP 300 also has a high degree of automation, including power-failure protection, out of wafer protection, a mask ident table, automated water flow monitoring, and a robotic loader with cassette handling capabilities. The tool also comes with a computer with a user-friendly graphical user interface for image modifications, process recipes, wafer tracking, and printed wafer information. As a final layer of protection, the product is outfitted with a number of fail-safe features which provide instant shutoff in the event of a catastrophic asset failure. Saturn AP 300 wafer stepper is an advanced and reliable tool for high volume working. Thanks to its outstanding resolution, automated features, and precise scanning capabilities, the AP 300 provides a one-stop solution for device fabrication. With its comprehensive suite of features, the AP 300 is an excellent choice for high-performance photolithography processing.