Used ULTRATECH Saturn Spectrum 3 #293628684 for sale

ID#: 293628684

Manufacturer:

ULTRATECH

Vintage:

1998

Wafer Size:

4"-8"

Equipment Details:

Stepper, 4"-8" G&H i-Line optics Lamp, 1000 W Extended Focus option for thick resist exposure capability GENMARK robot Servo pre-aligner Reticle, 5" (Capable of upgrading to 6") Reticle barcode reader Wafer Edge Exclusion (WE) Auto aperture COGNEX Machine Vision System (MVS) Max FOV of 44mm x 26.7mm Numerical aperture: 0.16 Lower pelicle protection Pneumatic-lock movable handler 1998 vintage.
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