Used ULTRATECH Saturn Spectrum 3 #293628684 for sale

ID: 293628684
Wafer Size: 4"-8"
Vintage: 1998
Stepper, 4"-8" G&H i-Line optics Lamp, 1000 W Extended Focus option for thick resist exposure capability GENMARK robot Servo pre-aligner Reticle, 5" (Capable of upgrading to 6") Reticle barcode reader Wafer Edge Exclusion (WE) Auto aperture COGNEX Machine Vision System (MVS) Max FOV of 44mm x 26.7mm Numerical aperture: 0.16 Lower pelicle protection Pneumatic-lock movable handler 1998 vintage.
ULTRATECH Saturn Spectrum 3 wafer stepper is a high-precision, high-performance tool designed for advanced optical lithography applications. It combines superior optical performance, a large 6.5 inch field size and an advanced optical design. Saturn Spectrum 3 is a multi-user system with a max exposure area of 6.5 inches, offering a high throughput and low cost of ownership. The advanced optical design of ULTRATECH Saturn Spectrum 3 utilizes a 4-mirror imaging system, offering superior image quality with a high aspect ratio and low image distortion. It also features a large 6.5 inch field size, allowing for higher device coverage yields for complex device designs. It provides superior depth of focus and low NA, making it ideal for low-k1 critical applications. In addition to its advanced optics, Saturn Spectrum 3 also features a high-speed Imation drive and load port. This provides fast and efficient wafer handling, for improved throughput and productivity. ULTRATECH Saturn Spectrum 3 also features a wide range of integrated wafer handling options, including auto-alignment, a vision-based alignment calibration system, and an integrated laser interferometer. This allows for superior alignment accuracy and throughput, making it ideal for high-volume production runs. Saturn Spectrum 3 can operate in both single and multi-user modes. It can easily connect to other tools via the standard networking protocols, allowing for remote access, and is fully compatible with Windows-based computers. Its intuitive, menu-driven interface makes it easy to use, and there are multiple additional software options available to customize and optimize it for specific operations. Overall, ULTRATECH Saturn Spectrum 3 is an excellent tool for high precision optical lithography applications, with superior optics, high throughput, and low cost of ownership. Its advanced optics and integrated wafer handling features make it an invaluable tool for advanced device designs, and its intuitive user interface and extensive software options ensure it can be easily customized for any specific application.
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