Used ULTRATECH Saturn Spectrum 3 #293761611 for sale
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ID: 293761611
Wafer Size: 6"-8"
Vintage: 2001
Stepper, 6"-8"
Type: Silicon
Flat notch wafer
Reticle size, 6"
DOF Monitor
Lamp intensity
i-Line and GHI
Resolution: 5 µm
(3) GHI Stepper
12-Slots reticle library
GENMARK Robot and controller
GENMARK Pre-aligner
Wafer chuck, 5"-8"
WAS Alignment
Wavelength filter
Illuminator
P/N:5000533 USHIO USH-1003FA Lamp
RASCO TBW-UD60S Chamber
Illuminator performance:
GHI Lamp: 1425 mJ/cm²
i-Line lamp: 455 mJ/cm²
2001 vintage.
ULTRATECH Saturn Spectrum 3 is an advanced wafer stepper designed for high-end photolithographic imaging for the semiconductor industry. It utilizes a 9-axis, linear motor-driven scanning stage coupled with a high-precision dual-mirror metrology equipment for superior resolution. An automated wafer exchange system allows for uninterrupted wafer processing and is compatible with 2-inch, 4-inch and 6-inch wafers. The stepper also showcases a high-accuracy optical alignment unit that can be adjusted to optimize the imaging of both single- and multi-level resists. Saturn Spectrum 3 is driven by an intuitive, user-friendly graphical user interface that aids in setup, alignment, wafer exchange, and job control. Advanced features such as the 'Intelligent Auto Focus Machine' enable efficient imaging in all types of wafer processes. Setup and calibration times are minimal and features like the 'Melt-On Delay' and 'Cycle-Trace' improve imaging consistency as well as reducing process development times. The stepper also includes an extensive suite of process optimization algorithms and imaging tools, such as 'MaxRepeatTM' and 'Free LinTM', which enable optimal critical dimension and line-width control for a variety of process steps and materials. Additionally, ULTRATECH Saturn Spectrum 3 has the ability to integrate with a range of wafer handling systems and can be controlled by an in-house tool or a remote locations using an ethernet-based communications link. Saturn Spectrum 3 also offers a variety of environmental settings designed to facilitate fine-grain environmental control. Through use of the exclusive 'Active Monitoring Asset', the operator can control the temperature, humidity and vibration levels on the wafer stage to maximize wafer utilization and yield. In addition, the stepper features 'Automated Bake-On Presence' to initiate optimal baking conditions, while the 'Dry Stop' feature eliminates potential stains during stability-critical processes such as stripping and PR hulling. Safety features such as fire suppression and emergency shut-off are built into ULTRATECH Saturn Spectrum 3 as well as an absorbing base plate to reduce vibrations. It is built to comply with the strictest safety standards and certifications and is therefore suitable for ultra-low contamination and ultra-precision imaging processes. Saturn Spectrum 3 is the premier wafer stepper for the production of high-precision, next-generation semiconductor wafers.
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