Used ULTRATECH Saturn Spectrum 3 #9182395 for sale
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ID: 9182395
Vintage: 2000
Stepper
Missing parts
Lens data
Exposure shutter
2000 vintage.
ULTRATECH Saturn Spectrum 3 is a state-of-the-art wafer stepper designed for photolithographyprocessing. As a stepper, it is capable of producing circuit features, such as transistors, onto a semiconductor wafer by exposing it to electromagnetic radiation. Saturn Spectrum 3 utilizes advanced ultraviolet, optical, and other wave sources to optimize imaging and minimize photoprocessing time. The stepper has an impressive resolution of 2µm and an automated field stitching of an 18mmfield. Its rigid structure enables both fast and accurate feature placement, giving it an extended scan speed up to 100mm/sec. It also features sophisticated systems for wavefront analysis and alignment, making it ideal for wafer refinement and precision placement. ULTRATECH Saturn Spectrum 3 features a dual component lithography system, using a top-down alignment method. This allows it to efficiently process wafers and exposed optical structures up to 18mm in diameter. It also features high stability chambers and load locks that support up to 5" substrates with a working temperature range of 10-40°C. The stepper comes with a user-friendly software interface that is compatible with Windows 10 and Linux operating systems, and is manufactured with both an isolated and faraday cage to protect sensitive data and intellectual property. It has a power requirement of 220VAC, three phase, and also supports Ethernet, RS232/485, or I/Os interface communication methods. This stepper is ideal for the advanced lithography processes that the semiconductor industry needs such as photoresist imaging, chemical amplification, and etching. Whether used in the research, industrial, or medical fields, Saturn Spectrum 3 can back up its ability to meet current and future standards of wafer processing.
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