Used ULTRATECH Saturn Spectrum 3 #9186993 for sale

ULTRATECH Saturn Spectrum 3 is a state-of-the-art wafer stepper that provides an automated approach to semiconductor fabrication. The equipment is designed to facilitate high through-put production of various integrated-circuit layers. With an integrated vision alignment system it is capable of high-resolution registration and exposure accuracy, ensuring the most reliable layer to layer uniformity. The Spectrum 3 utilizes stereoscopic imaging with 4" wafer matching capacity, and features a quadruple stage XY auto positioning unit with 5-axis scanning capability. The machine also features an advanced stage control tool with an automatic wafer exchange asset and integrated vacuum control model. This enables easy loading and unloading of wafers from cassettes, and a 6-zone heating oven. With this feature, uniform thermal exposure of both front and back sides of the wafer is possible. To further improve precision exposure accuracy, the equipment also comes with an optional short-arc high-intensity discharge (HID) lamp. The Spectrum 3 utilizes a computer driven optical stage and vision inspection system that inspect the wafer step edge for registration before beginning an exposure. It is capable of ultra-high-resolution (900nm) registration and features both single and double patterning capability. The unit is also highly flexible, offering full compatibility with a wide range of wafer processing environments, and can handle current technologies from 0.25um to 28nm. The machine boasts a robust software package that is designed to maximize throughput and efficiency. Its user-friendly graphical user interface (GUI) offers real-time and offline data analysis and both 2-D and 3-D visualization tools. As such, the Spectrum 3 is an excellent choice for precision semiconductor fabrication environments.