Used ULTRATECH Saturn Spectrum 3 #9280616 for sale

ULTRATECH Saturn Spectrum 3 is a state-of-the-art wafer stepper that is designed to meet the needs of demanding production facilities. This particular model of the Saturn Spectrum offers an unprecedented level of performance, accuracy and reliability. Saturn Spectrum 3 has a dynamic field of view that can reach up to 10°, making it possible to align wafers at resolutions of 1 µm. To achieve such precision, the stepper is equipped with a high-performance scanner, an integrated precision move actuator, a high-precision stage, and a high-speed processor. To help maintain the accuracy and repeatability of the stepper, ULTRATECH has incorporated flexure guiding technology into the machine's construction. This design ensures that the wafers remain stable while being aligned, even when subjected to vibration or false moves. The integrated precision move actuator also helps to ensure accurate and repeatable performance. Utilizing a miniature linear motor, the actuator can move the stepper in x, y, and z-axes with a maximum velocity of 40mm/s. This high-speed actuation is further enhanced by the integrated auto-focus (AF) feature, which enables the machine to identify the best focus position for the wafer automatically. To ensure significant cost savings, ULTRATEK has outfitted ULTRATECH Saturn Spectrum 3 with a wide range of software tools. The stepper's software package includes a statistical feedback program, a microscopic inspection program, and a trace report feature to monitor the machine's performance over time. Moreover, Saturn Spectrum 3 is designed for easy integration into production lines. It features compatibility with the standard communication protocols of automated handling systems, and can be upgraded with additional hardware components for enhanced performance. With its impressive capabilities, robust construction, and ease of integration, ULTRATECH Saturn Spectrum 3 can guarantee reliable and accurate performance for challenging production requirements.