Used ULTRATECH Saturn Spectrum 3 #9281727 for sale

ULTRATECH Saturn Spectrum 3 is a high-precision wafer stepper designed to align and pattern substrates and wafers in a variety of sizes as part of small chip design fabrication. This product takes the most advanced machine technology and combines it with sophisticated optical techniques, allowing for extremely precise application of photolithograpic patterns onto a substrate or wafer. Saturn Spectrum 3 consists of a high resolution lens equipment mounted on a precision motion system, together allowing for maximum accuracy of alignment and pattern application. The highly accurate lens unit is housed within the wafer stage head, providing reliable stepper performance and precisely controlled motion. To further ensure accuracy of pattern projection onto a substrate or wafer, ULTRATECH Saturn Spectrum 3 is equipped with an image distortion correction machine that enables the stepper to quickly align a substrate or wafer. This tool also ensures optimum pattern placement, as the stepper is capable of self-calibration when moved around different positions in the process chamber. Saturn Spectrum 3 is designed to provide a maximum process resolution of 1 micrometre across a full wafer or substrate size of 25 mm on the X and Y axis. Exposure pattern ranges from 0.25 to 5 microns, producing remarkably precise devices and microstructures. The stepper allows for the use of both photoresist and dry film lithography, allowing for special materials processing and enhanced functionalities. Additionally, the stepper is equipped with a built-in automatic device identification asset that provides accurate part to part registration in order to ensure precise pattern alignment. Aside from its sophisticated optical and mechanical equipment, ULTRATECH Saturn Spectrum 3 also consists of a state-of-the-art software that allows for maximum process control. This software offers real-time data interpretation, as well as online traceability for all processing steps. Additionally, it allows for precise patterning and adaptation for different types of lithography. Overall, Saturn Spectrum 3 is a premier wafer stepper that offers extraordinary accuracy with its highly advanced optical and motion systems. It ensures precise alignment and pattern application for different types of lithography, making it an ideal tool for producing highly precise devices and microstructures.