Used ULTRATECH Saturn Spectrum 300 #293807072 for sale

ULTRATECH Saturn Spectrum 300 is a state-of-the-art wafer stepper which is designed to provide accurately stepped exposures for direct-write lithography applications. It offers the unique blend of high performance and extremely low cost-per-exposure. The stepper is based on ULTRATECH proprietary Saturn 300 platform technology and provides an advanced resolution of 2µm. It contains resonant coil pattern scan stages with automated alignment capability, an advanced STEM imaging equipment, an integrated system control, and a powerful vacuum pump unit. The stepper also features a highly sensitive optical CCD camera attached to a four-axis, rotary microscope with 0.0025 micron resolution. This imaging camera helps the user to accurately catch every detail despite the patterns being extremely small. Saturn Spectrum 300 features an integrated optics machine which ensures low aberration production and high fidelity imaging. The optics tool can handle a variety of measurement ranges and has high dynamic range and fast measurement times. The stepper also features a high quality and reliable flight head asset for high throughput exposures with low particulate counts. This flight head helps with accurate exposure and monitoring of pattern movement and distortion during exposure steps. It also helps in providing a uniformly flat reticle with submicron feature size, and helps in executing lithography and inspection tasks at high speed. ULTRATECH Saturn Spectrum 300 also offers easy user access to all of its components. The user interface is well laid out and easy to use. The stepper contains several safety features such as temperature monitoring and camera shield shield to protect sensitive components from environmental hazards. Finally, Saturn Spectrum 300 is capable of providing superior image quality at the highest level of density resolution. Its advanced functionality and advanced vacuum pump model make it an ideal tool for all direct-write lithography applications.