Used ULTRATECH Saturn Spectrum 300 #9163594 for sale

ULTRATECH Saturn Spectrum 300 wafer stepper is a versatile, cost effective tool for the production of photomasks. The equipment is equipped with high precision, low cost wafer alignment and patterning capabilities. It can provide precise lithography with a high degree of accuracy for the small features of today's semiconductor devices. The Spectrum 300 features a 6"x 6" exposure field of view, with an accelerated field of view up to 6.8"x 6.8". The stepper has a 4.3-inch reticle-to-wafer gap that enables high fidelity imaging across multiple devices on a single substrate. The stepper also has the ability to image using different exposure energies as well as using both phase-shift and chromeless imaging processes. The system is equipped with an incremental height adjustment feature, which allows for patterning correction from wafer-to-wafer without needing to physically move the wafer stages. The unit also features electrical-field-free (EFF) imaging technology, which eliminates image distortion that can occur during conventional mask imaging. In terms of image fidelity, the Spectrum 300 provides excellent resolution with an 8-inch laser optical path and linear drive machine. The stepper also provides a high productivity with its three-field scan capability and high throughput. The tool can achieve a total scan rate of up to 3200um/second. The asset can be configured to have a total of 16 exposures, which allows for image overlay and extended lithography across multiple dies. The Spectrum 300 is capable of imaging both binary and Leff gratings, as well as repeating patterns. The model has a 0.25μm feature size resolution, with talbot enabled lens, which makes it suitable for advanced and demanding lithography applications. The equipment has a total travel range of 25mm in x and y with an accuracy of +/- 2μm. In terms of safety, the Spectrum 300 comes with several features and options, such as; Eye safety shutter, Dual Chain operation and Job Abort. The stepper has a state-of-the-art CE compliant control system and a user friendly graphical interface, enabling easy operation. Saturn Spectrum 300 wafer stepper is a cost effective and reliable tool for the production of photomasks. The unit is equipped with several features that enable precise and accurate imaging, a high degree of productivity and image fidelity as well as safety features that make the machine suitable for various lithography applications.