Used ULTRATECH Saturn Spectrum 300 #9312357 for sale

ID: 9312357
Wafer Size: 8"-12”
Vintage: 2002
Stepper, 8"-12" Illuminator: 1200 Watts (4) EFEM Wep Resolution: 2 um GHI Filer changer MVS PatMax No lens data 2002 vintage.
ULTRATECH Saturn Spectrum 300 is an advanced wafer stepper that offers superior flexibility in preparing photomasks for semiconductor fabrication. It works in conjunction with an automated wafer cassetting equipment, providing uniform substrate exposure and delivery. Saturn Spectrum 300 offers a variety of features important to substrate processing, including a 200mm wafer stage, a 6M pixel camera, and a 50,000 rpm motor to drive the wafer. It is capable of exposure scanning in standard and non-standard formats, and comes with special features such as automatic pattern rotation, laser pattern check, pattern registration, and pattern-dependent substrate exposure. It also has an intuitive graphical user interface, allowing users to easily program and monitor their photomasking operations. This advanced wafer stepper is designed to handle various substrate materials, including glass, quartz, and polyimide. The high-sensitivity of the system means that it can accurately and precisely place patterns on substrates with minimal distortion. It is also capable of stitching patterns during scanning with very low distortion. ULTRATECH Saturn Spectrum 300 provides a consistent exposure dose on wafer substrates, allowing for faster production times and fewer problems with non-scalable patterns. The unit can be programmed to create multiple scans of the same pattern on the same wafer substrate, which increases throughput and productivity. The machine can also be used to measure dose with an accuracy of up to a few percent. Saturn Spectrum 300 is designed to incorporate comprehensive safety features, including a built-in safety device to protect the wafer from UV and E-beam radiation. Other safety features include an optical grid to prevent optical damage to the substrate, and an anti-glare filter to eliminate the effect of stray light. The tool also incorporates a dual-stage cooling asset to ensure a precise temperature range and optimal process performance. ULTRATECH Saturn Spectrum 300 is capable of producing patterns at high resolution with the highest reliability. Its advanced algorithm-driven technology enables it to achieve the highest accuracy and repeatability. It offers unmatched support for a wide range of process operations, including substrate exposure, substrate staging, pattern registration, and more. Thanks to its user-friendly design and advanced features, Saturn Spectrum 300 wafer stepper is an essential tool for semiconductor Fab operations.
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