Used ULTRATECH Saturn Spectrum 300e #9221672 for sale
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ULTRATECH Saturn Spectrum 300e is a high-performance wafer stepper designed to provide superior resolution, throughput, and accuracy. Utilizing a state-of-the-art imaging system, the Spectrum 300e has the capabilities to handle 150mm wafers, aligning them with a positional accuracy of 2 microns. The 2X telecentric lenses utilize ultralow distortion, providing optimal focus and uniform image over the entire viewable field. This enables the stepper to produce an optimal resolution across the entire wafer size range. The Spectrum 300e also features two photon-counter scanners, which use laser beams to accurately measure the transfer function, drift, and noise of the imaging system. This not only ensures accurate and reliable imaging, but also ensures that even the most complex masks are accurately reproduced. The wafer loading station has been designed to provide an easy interface for wafer loading and unloading. In addition to the standard operation modes, the wafer loader can also be easily configured for front and back side alignment, enabling optimal throughput. In terms of performance, the Spectrum 300e is one of the fastest wafer steppers on the market. It is engineered with a two-ray exposure system that is capable of delivering a scan rate of up to 300mm/sec, ensuring that the process is completed quickly and accurately. To ensure maximum efficiency, the Spectrum 300e comes with a suite of software for effective monitoring and management of the stepper. In addition to controlling the stepper and wafer loading, the software suite provides advanced features such as pattern alignment, edge detection, fine-tuning of wafer rotation angle, and wafer loading fields. In addition to its impressive performance, the Spectrum 300e is easy to use and maintain. With its intuitive user interface and user-replaceable parts, it can easily be operated by personnel with minimal experience. Furthermore, the stepper is designed with durability in mind, and regularly goes through end-of-life testing so that customers can be confident in its performance. Saturn Spectrum 300e is an innovative and reliable wafer stepper that has been designed to deliver an optimal level of accuracy, throughput, and performance. Its combination of sophisticated imaging algorithms and ease of operation make it an ideal choice for any lab or production facility.
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