Used ULTRATECH Saturn Spectrum 3e #9160685 for sale

ULTRATECH Saturn Spectrum 3e is a high-performance, general-purpose wafer stepper capable of producing wafers with features in the 15 nm range. It has a wide range of modules and options, allowing for various customization levels, and its high-speed, automated alignment equipment guarantees precise positioning. The wafer stepper is designed around a motorized, XY stage and Z positioner, for precise step-and-repeat alignment, and a high-resolution, lighting system, to illuminate individual wafers with uniform illumination. The stepper is driven by an AC-motor fitted to the stage, which is capable of delivering linear motion up to 0.1 µm resolutions. ULTRATECH SATURN SPECTRUM 3 E also features a high-speed image capture unit, to acquire images of the wafers at up to 5 Hz per frame. This machine is capable of detecting small defects and differences, even in features with dimensions smaller than 15 nm. Along with the equipment, Saturn Spectrum 3e comes with suite of programs designed for patterning, inspection, metrology and manufacturing workflow management. It is also compatible with compatible with multiple software programs and standard layout formats, such as GDS, CDL, VHDL, CIF, and OASIS, allowing for greater flexibility in customization and integration of existing workflow. The wafer stepper offers up to 50 wafer chuck placement options, so users can align the main chuck to optimize illumination and image coverage. It also features a custom-built, powerful illuminator, capable of delivering up to 1.2 kW of UV illumination. SATURN SPECTRUM 3 E incorporates a patented, closed-loop tool-align technology, allowing for extremely precise positional accuracy in patterning of features with dimensions as small as 15 nm. It also features enhanced wafer chuck interlocks which ensure that the wafer alignment remains optimized for multiple exposures. ULTRATECH Saturn Spectrum 3e is a reliable, high-performance wafer stepper, capable of producing precision wafers with features down to 15 nm. With its powerful illumination, precise alignment, and versatile software integration, this wafer stepper is ideal for a variety of applications and workflows.